Rapid thermal processing : science and technology

By: Fair, Richard B [Editor]
Language: English Language Publisher: Boston Academic 1993Description: viii,430 p. illISBN: 0122476905Subject(s): Electronic engineering | Semiconductor doping | Semiconductors-Heat treatmentDDC classification: 621.381 52 Online resources: Click here to access online
List(s) this item appears in: Engineering
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Item type Current location Home library Collection Call number Status Date due Barcode Item holds
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Genaral Collection 621.381 52 R16 (Browse shelf) Available 06362
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