TY  - BOOK
AU  - Giurgiutiu, Victor 
AU  - Lyshevski, Sergry Edward  
TI  - Micromechatronics 
SN  - 9780849315930
U1  - 621 
PY  - 2004///
CY  - Boca Raton 
PB  - CRC press 
KW  - Microelectromechanical systems
UR  - https://www.amazon.com/Micromechatronics-Modeling-Microscience-Engineering-Technology/dp/084931593X/ref=sr_1_1?dchild=1&keywords=9780849315930&qid=1623232313&s=books&sr=1-1&asin=084931593X&revisionId=&format=4&depth=1
ER  -