000 | 003110000a22001210004500 | ||
---|---|---|---|
999 |
_c15596 _d15596 |
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003 | KDUcat | ||
008 | 170428b xxu||||| |||| 00| 0 eng d | ||
020 | _a0803104596 | ||
041 | _aEnglish | ||
082 |
_a621.38152 _bE52 |
||
245 | _aEmerging semiconductor technology | ||
260 |
_aPhiladelphia _bASTM _c1987 |
||
300 |
_a704 p. _bill |
||
650 |
_aEmerging semiconductor technology _929206 |
||
942 |
_cLM _2ddc |